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SIC 코팅 MOCVD 감수자
  • SIC 코팅 MOCVD 감수자SIC 코팅 MOCVD 감수자
  • SIC 코팅 MOCVD 감수자SIC 코팅 MOCVD 감수자

SIC 코팅 MOCVD 감수자

Veteksemicon의 SIC 코팅 MOCVD 감수자는 우수한 프로세스, 내구성 및 신뢰성을 가진 장치입니다. 그들은 고온과 화학 환경을 견딜 수 있고 안정적인 성능과 장수를 유지하여 교체 및 유지 보수 빈도를 줄이고 생산 효율성을 향상시킬 수 있습니다. 우리의 MoCVD 에피 택셜 감수자는 고밀도, 탁월한 평평성 및 우수한 열 제어로 유명하여 가혹한 제조 환경에서 선호되는 장비입니다. 당신과 협력하기를 기대하십시오. 언제든지 상담하십시오.

Veteksemicon's MOCVD Epitaxial Susceptors are designed to withstand high temperature environments and harsh chemical conditions common in the wafer production process. Through precision engineering, these components are tailored to meet the stringent requirements of epitaxial reactor systems. 


Our MOCVD Epitaxial Susceptors are made of high-quality graphite substrates coated with a layer of silicon carbide (SiC), which not only has excellent high temperature and corrosion resistance, but also ensures uniform heat distribution, which is critical to maintaining consistent epitaxial film deposition.


In addition, our semiconductor susceptors have excellent thermal performance, which allows for fast and uniform temperature control to optimize the semiconductor growth process. They are able to withstand the attack of high temperature, oxidation, and corrosion, ensuring reliable operation even in the most challenging operating environments.


In addition, the Silicon Carbide Coating MOCVD Susceptors are designed with a focus on uniformity, which is critical to achieving high-quality single crystal substrates. The achievement of flatness is essential to achieve excellent single crystal growth on the wafer surface.


At Veteksemicon, our passion for exceeding industry standards is as important as our commitment to cost-effectiveness for our partners. We strive to provide products such as the MOCVD Epitaxial Susceptor to meet the ever-changing needs of semiconductor manufacturing and anticipate its development trends to ensure your operation is equipped with the most advanced tools. We look forward to building a long-term partnership with you and providing you with quality solutions.


Product parameter of the SiC Coated MOCVD Susceptor

Basic physical properties of CVD SiC coating
Property Typical Value
Crystal Structure FCC β phase polycrystalline, mainly (111) oriented
Density 3.21 g/cm³
Hardness 2500 Vickers hardness(500g load)
Grain SiZe 2~10μm
Chemical Purity 99.99995%
Heat Capacity 640 J·kg-1·K-1
Sublimation Temperature 2700℃
Flexural Strength 415 MPa RT 4-point
Young's Modulus 430 Gpa 4pt bend, 1300℃
Thermal Conductivity 300W·m-1·K-1
Thermal Expansion(CTE) 4.5×10-6K-1


CVD SIC FILM CRYSTAL STRUCTURE

SEM DATA OF CVD SIC FILM CRYSTAL STRUCTURE

Veteksemicon SiC Coated MOCVD Susceptor Shop

SiC Coated MOCVD Susceptor Production Shop

Overview of the semiconductor chip epitaxy industry chain:

semiconductor chip epitaxy industry chain


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